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Menu
Thin Films
Sputter
Evap
PECVD
Etching
ICP
RIE/O2
Wet Etch
Lithography
Photochemicals
Spin Coater
Mask Aligner
Spray Developer
DUV Laser Lithography
Substrate Prep
Vapor Prime/IR
Megasonic Clean
UV O3
Thermal
Rapid Thermal
Diffusion/Oxidation Furnace
Contact Bake
Convection Oven
Hot Plates
Muffle Furnace
Packaging
Wafer Bonder
Wire Bonder
Thinning/Grinding
Microfluidics
Metrology
Surface Profiler
SEM Library
Reflection/Transmission
Inspection Microscope
Horizontal Microscope
Probe Station
4-point Probe
IR Spectroscopy
Nano-Photonics Device Fab Lab
Principal Investigator
Professor Andrew Sarangan
Team Members
Andrew Sarangan
Professor
Chuan Ni
PhD Student
David Lombardo
PhD Student
Pengfei Guo
PhD Student
Josh Duran
PhD Student
