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Prof. Andrew Sarangan

Nano-Fab Lab: Semiconductor Device Fabrication
+1 937-229-3190
sarangan@udayton.edu
University of Dayton
  • Thin Films
    • RF/DC Sputter
    • E-beam Evaporator
    • PECVD
  • Etching
    • ICP/RIE
    • RIE/O2
    • Wet Etch
  • Lithography
    • Contact Mask Aligner
    • DUV Laser Lithography
    • Spin Coater
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    • Convection Oven
    • RT Hotplates
    • Muffle Furnace
  • Packaging
    • Wafer Bonder
    • Wire Bonder
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  • Metrology
    • Surface Profiler
    • Atomic Force Microscope
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    • Reflection/Transmission
    • Compound Microscope
    • Horizontal Microscope
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    • 4-Point Probe
    • IR Spectroscopy
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    • Laser Interference Lithography
    • Silicon Nanowires (MACE)
    • Optical Waveguide Sensors
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    • Phase Change Materials (VO2)
    • Phase Change Materials (GST)
    • Silicon Infrared Photodetectors
    • Laser Assisted Chemical Etching (LASE)
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4-Point Probe



  • Logs
  • Maintenance
  • TCR Measurements
  • Sheet Resistance Measurements
  • Documents


This homebuilt 4-point probe is used for sheet resistance measurement as well as automated temperature cycling for temperature coefficient of resistance (TCR) measurements.
+1 937-229-3190
sarangan@udayton.edu
University of Dayton
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