 This is a stylus profiler that can take line scans of thin films and measure their thicknesses down to about 20 Angstroms of accuracy. Film stress can also be measured by taking pre- and post deposition scans. |
This is a stylus profiler that can take line scans of thin films and measure their thicknesses down to about 20 Angstroms of accuracy. Film stress can also be measured by taking pre- and post deposition scans. |