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Prof. Andrew Sarangan
Nano-Fab Lab: Semiconductor Device Fabrication
+1 937-229-3190
sarangan@udayton.edu
University of Dayton
Thin Films
RF/DC Sputter
E-beam Evaporator
PECVD
Etching
ICP/RIE
RIE/O2
Wet Etch
Lithography
Contact Mask Aligner
DUV Laser Lithography
Spin Coater
Spray Developer
Photochemicals
Substrate Prep
Vapor Prime/Image Reversal
Megasonic Cleaner
UV Ozone
Thermal
Rapid Thermal
Diffusion/Oxidation Furnace
Contact Bake
Convection Oven
RT Hotplates
Muffle Furnace
Packaging
Wafer Bonder
Wire Bonder
Thinning/Polishing
Microfluidics
Metrology
Surface Profiler
Atomic Force Microscope
SEM Library
Reflection/Transmission
Compound Microscope
Horizontal Microscope
Probe Station
4-Point Probe
IR Spectroscopy
Chemicals
Photoresists
Developers
Ancillary Photochemicals
Solvents
Acids
Wet Etchants
Gases
Solids
Sputter Targets
Other Chemicals
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Cr Photomask Files
Photoplot Files
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Others
Lifesize/Zoom Conferencing
Cleanroom Environment
Loaned Items
He Leak Detector
Particle Counter
DI Water Tester
Thermocouple Welder
Phone Numbers
Projects
Laser Interference Lithography
Silicon Nanowires (MACE)
Optical Waveguide Sensors
Nanostructured Thin Films
Metal-Dielectric Thin Films
Fourier Multispectral Filters
Phase Change Materials (VO2)
Phase Change Materials (GST)
Silicon Infrared Photodetectors
Laser Assisted Chemical Etching (LASE)
Computational Electromagnetics
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Beuhler MPC 3000 Backside Grinding System
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