Safety	Thin Films	Etching	Substrate Prep	Photolithography
Lab Intro MSDS Contacts Laboratory Environment Exit Checklists	RF Sputter E-beam Evaporation PECVD	ICP RIE/O2 Wet Etch	UV O3 Clean Vapor Prime / Vacuum Bake Bake Stations Megasonic Clean	Photochemicals Resist Coater Mask/Bond Aligner Spray Developer DUV Laser Lithography
Characterization	Bonding/Packaging	Misc Equipment	Inventory	Files
Surface Profiler Reflectance/Transmittance	Substrate Bonder Wire Bonder Backside Thinner	He Leak Detector Particle Counter DI Water Tester Others	Chemicals Gowning	SEM/Microscope Images Photomasks Software Other Files